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Elsevier‎(2002)‎

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By Orlov V.   Richter H.   Fischer A.   Reif J.   Muller T.   Wahlich R.   in Materials Science in Semiconductor Processing

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Elsevier‎(2002)‎

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By Akhmetov V. D.   Richter H.   Seifert W.   Lysytskiy O.   Wahlich R.   Müller T.   Reiche M.   in EPJ Applied Physics (The)

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Edp Sciences‎(2010)‎

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