By Hirano Hideki   Kimura Tetsuya   Koutsaroff Ivoyl P   Kadota Michio   Hashimoto Ken-ya   Esashi Masayoshi   Tanaka Shuji   in Journal of Micromechanics and Microengineering

ISSN:0960-1317|23|2|25005-25013

IOP Publishing‎(2013)‎

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