By Jia Fengdong   Ishikawa Kenji   Takeda Keigo   Kano Hiroyuki   Kularatne Jagath   Kondo Hiroki   Sekine Makoto   Hori Masaru   in Plasma Sources Science and Technology

ISSN:0963-0252|23|2|25004-25010

IOP Publishing‎(2014)‎

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