Analytical Techniques for the Characterization of Compound Semiconductors ( Volume 21 )

Publication series :Volume 21

Author: Bastard   G.;Oppolzer   H.  

Publisher: Elsevier Science‎

Publication year: 1991

E-ISBN: 9780444596727

P-ISBN(Paperback): 9780444891969

P-ISBN(Hardback):  9780444891969

Subject: O4 Physics;O6-0 chemical principle and method;TB3 Engineering Materials

Language: ENG

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Description

This volume is a collection of 96 papers presented at the above Conference. The scope of the work includes optical and electrical methods as well as techniques for structural and compositional characterization. The contributed papers report on topics such as X-ray diffraction, TEM, depth profiling, photoluminescence, Raman scattering and various electrical methods. Of particular interest are combinations of different techniques providing complementary information. The compound semiconductors reviewed belong mainly to the III-V and III-VI families. The papers in this volume will provide a useful reference on the implications of new technologies in the characterization of compound semiconductors.

Chapter

Front Cover

pp.:  1 – 4

Copyright Page

pp.:  5 – 12

Preface

pp.:  6 – 8

Conference Organization

pp.:  8 – 10

Table of Contents

pp.:  12 – 6

Chapter 3. Transmission electron microscopy of heteroepitaxial layer structures

pp.:  36 – 45

Chapter 4. Control of MBE, MOMBE and CBE growth using RHEED

pp.:  45 – 51

Chapter 5. Soft X-ray photoelectron spectroscopy of compound semiconductor surfaces and interfaces

pp.:  51 – 59

Chapter 6. Secondary ion mass spectrometry of dopants and impurities in compound semiconductors: depth profiling of homo- and heterostructure

pp.:  59 – 69

Chapter 7. Electrical and optical defect spectroscopy of compound semiconductors

pp.:  69 – 80

Chapter 8. Extended abstract Subpicosecond luminescence spectroscopy of heterostructures

pp.:  80 – 82

Chapter 9. Far-infrared spectroscopy of impurities in semiconductors

pp.:  82 – 90

Chapter 10. Micro-Raman spectroscopy for characterization of semiconductor devices

pp.:  90 – 96

Chapter 11. Raman spectroscopy for impurity characterization in III–V semiconductors

pp.:  96 – 104

Chapter 12. Modelling interdiffusion in epitaxial multilayer structures using X-ray simulation techniques

pp.:  104 – 109

Chapter 13. Characterization of (In,Ga) As/GaAs strained-layer multiple quantum wells with high-resolution X-ray diffraction and computer simulations

pp.:  109 – 114

Chapter 14. Assessment of mismatched epitaxial layers by X-ray rocking curve measurements and simulations

pp.:  114 – 120

Chapter 15. A combination of high-resolution X-ray diffractometry and diffraction imaging techniques applied to the study of MOVPE-grown CdxHg1–xTe/CdTe on GaAs

pp.:  120 – 126

Chapter 16. Interface roughness of GaAs/AlAs superlattices MBE-grown on vicinal surfaces

pp.:  126 – 132

Chapter 17. TEM study of the origin of the surface microroughness in DSL photoetched Si-implanted GaAs wafers

pp.:  132 – 136

Chapter 18. TEM in-situ observation of recombination-enhanced mobility of dislocations in II–VI compounds

pp.:  136 – 142

Chapter 19. Investigation of surface and sub-surface defects on polished InP substrates using Auger electron spectroscopy coupled to argon ion sputtering

pp.:  142 – 148

Chapter 20. High-depth-resolution SIMS analysis for InGaAs/InP interfaces

pp.:  148 – 155

Chapter 21. Optimization of Zn dopant profiles in a pin-diode/FET by combination of depth profiling techniques: a SIMS, ECV and AES study

pp.:  155 – 160

Chapter 22. Improved method for depth profiling of multilayer structures

pp.:  160 – 166

Chapter 23. A new, fast method for the computer simulation of CV profiles in multilayer structures

pp.:  166 – 171

Chapter 24. Characterization of Cd implanted and annealed GaAs and InP by perturbed angular correlation (PAC) spectroscopy

pp.:  171 – 176

Chapter 25. Defects in CdS:In detected by perturbed angular correlation spectroscopy (PAC)

pp.:  176 – 182

Chapter 26. Microscopical studies at cadmium impurities in compound semiconductors

pp.:  182 – 186

Chapter 27. Structural defect recovery in GaP after heavy ion implantation

pp.:  186 – 190

Chapter 28. Hydrogen depth profile measurement in a-Si1-xCx:H films by elastic recoil detection

pp.:  190 – 194

Chapter 29. Carbon analysis in CdTe by nuclear activation

pp.:  194 – 198

Chapter 30. Combined application of SEM-CL and SEM-EBIC for the investigation of compound semiconductors

pp.:  198 – 203

Chapter 31. Intensity variations in the near-band-edge recombination of GaP epitaxial layers, grown on (111) and (001) oriented substrates, as observed by cathodoluminescence imaging

pp.:  203 – 208

Chapter 32. Cathodoluminescence investigations of RIE-induced defects in InP

pp.:  208 – 213

Chapter 33. Ultrahigh resolution characterisation of compound semiconductors using pulsed laser atom probe techniques

pp.:  213 – 219

Chapter 34. Inductively coupled plasma–atomic emission spectrometry (ICP-AES): an analytical technique for the chemical characterization of perovskite ceramic semiconductors

pp.:  219 – 224

Chapter 35. A study of structural properties of bulk double-doped InP by laser scattering tomography and photoetching

pp.:  224 – 229

Chapter 36. Computing errors in Fourier transform photoluminescence

pp.:  229 – 235

Chapter 37. Theoretical basis for the quantitative characterization of impurities in n-type III–V compound semiconductors by photoelectromagnetic spectroscopy

pp.:  235 – 239

Chapter 38. Characterization of si-GaAs wafer quality by room-temperature photoluminescence

pp.:  239 – 245

Chapter 39. Ambient and low temperature photoluminescence topography of GaAs substrates, epitaxial and implanted layers

pp.:  245 – 250

Chapter 40. Effect of substrate orientation on the defect-induced bound exciton emissions in GaAs grown by molecular beam epitaxy

pp.:  250 – 254

Chapter 41. Spatial investigation of an iron-doped indium phosphide ingot

pp.:  254 – 262

Chapter 42. Neutron transmutation doping of GaP: optical studies

pp.:  262 – 266

Chapter 43. Photoluminescence study of proton-implanted InP1-xAsx:Yb

pp.:  266 – 270

Chapter 44. Complex formation in Mn-doped GaP samples

pp.:  270 – 274

Chapter 45. Three-center Auger effect and the quantum yield of the luminescence of ZnS-based phosphors

pp.:  274 – 278

Chapter 46. Analysis of impurity distribution in n-GaAs layers by photoconductivity and cyclotron resonance measurements

pp.:  278 – 282

Chapter 47. Post-transit-time analysis of time-of-flight photocurrents

pp.:  282 – 286

Chapter 48. Time-evolution of low-temperature photoconductivity and Hall mobility in semi-insulating GaAs

pp.:  286 – 290

Chapter 49. Interstitial Mn as a new donor in GaP and GaAs: an EPR study

pp.:  290 – 294

Chapter 50. Donor–acceptor charge transfers in bulk semi-insulating GaAs as revealed by photo-EPR

pp.:  294 – 298

Chapter 51. Investigation of reactive ion etch-induced damage in InP surfaces using a noncontact photothermal radiometric probe

pp.:  298 – 302

Chapter 52. Semiconductor electrical properties from the frequency dependence of the dielectric constant: application to n-type ZnSe heteroepitaxial thin films

pp.:  302 – 307

Chapter 53. Reactive-ion-etch damage in GaAs processing evaluated by a microwave absorption technique

pp.:  307 – 312

Chapter 54. Free-carrier concentration in n-doped InP crystals determined by Raman scattering measurements

pp.:  312 – 317

Chapter 55. Characterization of III–V compounds by quasi-elastic electronic scattering of light

pp.:  317 – 320

Chapter 56. Determination of elastic properties of Si/Ge superlattices and Si1-xGex films from surface acoustic modes by Brillouin scattering

pp.:  320 – 325

Chapter 57. Ο implantation in ZnSe: lattice distortion by Raman measurement

pp.:  325 – 329

Chapter 58. Raman characterization of passivated GaAs surfaces

pp.:  329 – 334

Chapter 59. Confined optical vibrations: a new probe for alloy disorder

pp.:  334 – 338

Chapter 60. Resonant Rayleigh scattering from excitons in CdxZn1-xTe:ZnTe quantum wells: measurement of homogeneous linewidths

pp.:  338 – 342

Chapter 61. Electro-optic sampling of surface space-charge fields on III–V compounds

pp.:  342 – 347

Chapter 62. Physical characterization of OMVPE-grown AlxGa1-xAs multi-layer films by means of non-destructive optical reflectometry

pp.:  347 – 354

Chapter 63. Picosecond transient photoreflectance measurements of ion-implanted GaAs

pp.:  354 – 358

Chapter 64. Reflectometry-aided surface layer investigation

pp.:  358 – 363

Chapter 65. Non-destructive characterisation of (Ga,In,Al,As,P)-based ternary multilayer structures using spectroscopic ellipsometry

pp.:  363 – 370

Chapter 66. Alloy disorder effects in III–V ternaries studied by modulation spectroscopy

pp.:  370 – 376

Chapter 67. Determination of ion beam etching damage on InP by spectroscopic ellipsometry

pp.:  376 – 381

Chapter 68. Infrared absorption of n- and p-type Fe-doped InP and mapping of the Fe distribution

pp.:  381 – 386

Chapter 69. Two-wavelength transmission: a rapid and precise method for measuring the light absorption in semiconductors

pp.:  386 – 390

Chapter 70. Single-beam thermowave analysis of semiconductors

pp.:  390 – 394

Chapter 71. Microscopic defect level characterization of semi-insulating compound semiconductors by TSC and PICTS Application to the effect of hydrogen in CdTe

pp.:  394 – 400

Chapter 72. Long-term stability of InP MIS devices

pp.:  400 – 407

Chapter 73. Hydrogen passivation and reactivation of shallow Zn acceptors in GaAs

pp.:  407 – 412

Chapter 74. An investigation of photo-quenching properties of LEC GaAs by using optical and electrical techniques

pp.:  412 – 417

Chapter 75. The influence of the DX center on the capacitance of Schottky barriers in n-type AlGaAs

pp.:  417 – 422

Chapter 76. Analysis of electron mobility versus temperature after photoexcitation in Si-doped AlxGa1-xAS

pp.:  422 – 427

Chapter 77. Carrier and mobility profile measurements in n-type ion-implanted GaAs by the differential sheet resistivity and Hall effect technique

pp.:  427 – 432

Chapter 78. Electrical properties of neutron-transmutation-doped InSe

pp.:  432 – 437

Chapter 79. Landau oscillations in single quantum wells observed by microwave detection

pp.:  437 – 441

Chapter 80. An investigation of metal/GaAs(100) interfaces by deep level transient spectroscopy

pp.:  441 – 445

Chapter 81. Characterization of alloy composition in Ga1-xAlxAs/GaAs structures: comparison of photovoltage, X-ray, SIMS and RHEED techniques

pp.:  445 – 451

Chapter 82. GaSb/GaAs heteroepitaxy characterized as a stress-free system

pp.:  451 – 457

Chapter 83. The relationship between electrical and structural characteristics of CdTe and CdMnTe layers grown on InSb

pp.:  457 – 462

Chapter 84. The molecular beam epitaxial growth of GaAs(111)/Si(111): a variable growth temperature study

pp.:  462 – 467

Chapter 85. Strain and defect densities in Si/Si1-xGex heterostructures investigated by ion scattering and X-ray diffraction

pp.:  467 – 473

Chapter 86. Limitations of interface sharpness in a-Si:H/a-SiC:H multilayers

pp.:  473 – 479

Chapter 87. Correlated use of characterization techniques to optimize the Mg implantation annealing for self-aligned HBT's

pp.:  479 – 483

Chapter 88. Electrical characterization of argon-ion sputtered n-GaAs

pp.:  483 – 487

Chapter 89. Combined application of spreading-resistance and electron-microprobe depth profiling on GaAs:Zn and Si:Ρ

pp.:  487 – 492

Chapter 90. Dislocation density, infrared absorption and cathodoluminescence mapping of microstructure associated with dislocation cells in semi-insulating LEC GaAs

pp.:  492 – 497

Chapter 91. Variation of material parameters along the growth direction of liquid encapsulated Czochralski grown GaAs ingots

pp.:  497 – 502

Chapter 92. Evaluation of the diffusion length of minority carriers in bulk GaAs

pp.:  502 – 507

Chapter 93. Identification of the double and single acceptor state of isolated NiGa in GaAs

pp.:  507 – 513

Chapter 94. Complete identification of the Ti-related levels in GaP

pp.:  513 – 517

Chapter 95. Electronic properties and band structure of IrSe2

pp.:  517 – 522

Chapter 96. Comparison of pyrite thin films obtained from Fe and natural pyrite powder

pp.:  522 – 527

Author index

pp.:  527 – 534

Subject index

pp.:  534 – 555

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