Top-down silicon microcantilever with coupled bottom-up silicon nanowire for enhanced mass resolution

Author: Vidal-Álvarez Gabriel   Agustí Jordi   Torres Francesc   Abadal Gabriel   Barniol Núria   Llobet Jordi   Sansa Marc   Fernández-Regúlez Marta   Pérez-Murano Francesc   Gottlieb Oded   Vidal-Álvarez Gabriel  

Publisher: IOP Publishing

E-ISSN: 1361-6528|26|14|145502-145510

ISSN: 0957-4484

Source: Nanotechnology, Vol.26, Iss.14, 2015-04, pp. : 145502-145510

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