Author: Lin Hung-Cheng Zan Hsiao-Wen Chao Yu-Chiang Chang Ming-Yu Meng Hsin-Fei
Publisher: IOP Publishing
E-ISSN: 1361-6641|30|5|54003-54016
ISSN: 0268-1242
Source: Semiconductor Science and Technology, Vol.30, Iss.5, 2015-05, pp. : 54003-54016
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