Scalable control of graphene growth on 4H-SiC C-face using decomposing silicon nitride masks

Author: Puybaret Renaud   Hankinson John   Palmer James   Bouvier Clément   Ougazzaden Abdallah   Voss Paul L   Berger Claire   de Heer Walt A  

Publisher: IOP Publishing

E-ISSN: 1361-6463|48|15|152001-152006

ISSN: 0022-3727

Source: Journal of Physics D: Applied Physics, Vol.48, Iss.15, 2015-04, pp. : 152001-152006

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Abstract