Surface damage and mechanical strength of silicon wafers

Publisher: John Wiley & Sons Inc

E-ISSN: 1610-1642|12|8|1119-1122

ISSN: 1862-6351

Source: PHYSICA STATUS SOLIDI (C) - CURRENT TOPICS IN SOLID STATE PHYSICS, Vol.12, Iss.8, 2015-08, pp. : 1119-1122

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract