Technology Evolution for Silicon Nano-Electronics

Author: Miyazaki Seiichi; Tabata Hitoshi  

Publisher: Trans Tech Publications‎

Publication year: 2011

E-ISBN: 9783038134947

P-ISBN(Paperback): 9783037850510

Subject: TB3 Engineering Materials

Keyword: 工程材料学

Language: ENG

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Description

Volume is indexed by Thomson Reuters CPCI-S (WoS).Silicon ultra-large scale integrated circuits (ULSIs) are now faced with various physical limits to further scaling. Therefore, it is very important to establish the fundamental science and technology required to produce nano-scale complementary metal-oxide-semiconductor devices (Nano-CMOS) having high performance, new functionalities and larger-scale integration. The scope of this book covers: - Nano-scale complementary metal-oxide-semiconductor devices (Nano-CMOS), - Novel functional devices, materials, and nanoprocessing technologies, - Nano-bio physics and technologies for future nano devices, - Variability control technologies and Signal integrity. This makes it a very useful handbook on the subject. The 38 selected and peer-reviews papers gathered here explore possible directions now that silicon-based semiconductors are running up against physical limits to further miniaturization. They cover nano-structure physics and nano-material science, nano-processing and nano-devices, nano-system functionality integration, and nano-device integrity for variability and fluctuation and management and integration. Among the topics are photoluminescence characteristics of ultra-thin silicon-on-insulators at low temperature, the nano-surface modification of silicon with an ultra-short pulse laser process, the microscopic structure of directly bonded silicon substrates, and analyzing threshold voltage variations in fin field e

Chapter

Functional Device Applications of Nanosilicon

Tunable Single-Electron Turnstile Using Discrete Dopants in Nanoscale SOI-FETs

KFM Observation of Electron Charging and Discharging in Phosphorus-Doped SOI Channel

Photoluminescence Characteristics of Ultra-Thin Silicon-on-Insulator at Low Temperatures

Investigation about I-V Characteristics in a New Electronic Structure Model of the Ohmic Contact for Future Nano-Scale Ohmic Contact

Collective Electron Tunneling Model in Si-Nano Dot Floating Gate MOS Structure

Electronic Structure and Spin-Injection of Co-Based Heusler Alloy/ Semiconductor Junctions

First-Principles Calculations of the Dielectric Constant for the GeO2 Films

Nanosize Electronics Material Analysis by Local Quantities Based on the Rigged QED Theory

Novel Source Heterojunction Structures with Relaxed-/Strained-Layers for Quasi-Ballistic CMOS Transistors

Effect of Al2O3 Deposition and Subsequent Annealing on Passivation of Defects in Ge-Rich SiGe-on-Insulator

II. Nano-Processing and Nano-Devices

Controlled Synthesis of Carbon Nanowalls for Carbon Channel Engineering

Resistive Memory Utilizing Ferritin Protein with Nano Particle

Atomically Controlled Plasma Processing for Group IV Quantum Heterostructure Formation

Nanometer-Scale Characterization Technique for Si Nanoelectric Materials Using Synchrotron Radiation Microdiffraction

Generation and Growth of Atomic-Scale Roughness at Surface and Interface of Silicon Dioxide Thermally Grown on Atomically Flat Si Surface

Nano-Surface Modification of Silicon with Ultra-Short Pulse Laser Process

Evaluation of Strained Silicon by Electron Back Scattering Pattern Compared with Raman Measurement and Edge Force Model Calculation

Development of New Methods for Fine-Wiring in Si Using a Wet Catalytic Reaction

III. Nano-System Functionality Integration

Optical Response of Si-Quantum-Dots/NiSi-Nanodots Stack Hybrid Floating Gate in MOS Structures

Energy Band Engineering of Metal Nanodots for High Performance Nonvolatile Memory Application

Strained Ge and Ge1-xSnx Technology for Future CMOS Devices

Improved Electrical Properties and Thermal Stability of GeON Gate Dielectrics Formed by Plasma Nitridation of Ultrathin Oxides on Ge(100)

Structural Change during the Formation of Directly Bonded Silicon Substrates

Microscopic Structure of Directly Bonded Silicon Substrates

Formation of Nanotubes of Carbon by Joule Heating of Carbon-Contaminated Si Nanochains

Si Nanodot Device Fabricated by Thermal Oxidation and their Applications

Influences of Carrier Transport on Drain-Current Variability of MOSFETs

Resistive Switching in NiO Bilayer Films with Different Crystallinity Layers

IV. Nano-Device Integrity for Variability / Fluctuation Management and Integration

Analysis of Threshold Voltage Variations in Fin Field Effect Transistors

Capture/Emission Processes of Carriers in Heterointerface Traps Observed in the Transient Charge-Pumping Characteristics of SiGe/Si-Hetero-Channel pMOSFETs

Quasi-Ballistic Transport in Nano-Scale Devices: Boundary Layer, Potential Fluctuation, and Coulomb Interaction

Effect of Back Bias on Variability in Intrinsic Channel SOI MOSFETs

Discrete Dopant Effects on Threshold Voltage Variation in Double-Gate and Gate-All-Around Metal-Oxide-Semiconductor Field-Effect-Transistors

Interconnect Design Challenges in Nano CMOS Circuit

Keywords Index

Authors Index

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