Author: Chiou Jin-Chern Huang Yu-Chieh Yeh Guan-Ting
Publisher: IOP Publishing
E-ISSN: 1361-6439|26|1|15001-15013
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.26, Iss.1, 2016-01, pp. : 15001-15013
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Abstract
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