Development of a target for laser-produced plasma EUV light source using Sn nano-particles

Author: Tanaka H.   Akinaga K.   Takahashi A.   Okada T.  

Publisher: Springer Publishing Company

ISSN: 0947-8396

Source: Applied Physics A, Vol.79, Iss.4-6, 2004-09, pp. : 1493-1495

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next