Mitigation of Contact Bounces in Electrostatically Actuated Nonprismatic Microbeams

Publisher： Bentham Science Publishers

E-ISSN： 1876-4037|8|2|99-113

ISSN： 1876-4029

Source： Micro and Nanosystems, Vol.8, Iss.2, 2017-06, pp. : 99-113

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