Structure and mechanical properties of hard amorphous carbon-nitrogen films obtained by plasma decomposition of methane-ammonia mixtures

Author: Freire F.L.J.   Franceschini D.F.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.293, Iss.1, 1997-01, pp. : 236-243

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Abstract