A new systematic method of characterization for the strength of thin films on substrates-evaluation of mechanical properties by means of 'film projection'

Author: Kamiya S.   Kimura H.   Yamanobe K.   Saka M.   Abe H.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.414, Iss.1, 2002-07, pp. : 91-98

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