Microwave plasma oxidation of gallium nitride

Author: Pal S.   Mahapatra R.   Ray S.K.   Chakraborty B.R.   Shivaprasad S.M.   Lahiri S.K.   Bose D.N.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.425, Iss.1, 2003-02, pp. : 20-23

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Abstract