Optimization of sputtering conditions for protective carbon thin films of rigid disks deposited by FTS

Author: Noda K.   Kawanabe T.   Hirata T.   Naoe M.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.51, Iss.4, 1998-12, pp. : 735-740

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Abstract