A novel precision positioning table utilizing impact force of spring-mounted piezoelectric actuator-part I: experimental design and results

Author: Liu Y.-T.   Higuchi T.   Fung R.-F.  

Publisher: Elsevier

ISSN: 0141-6359

Source: Precision Engineering, Vol.27, Iss.1, 2003-01, pp. : 14-21

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Abstract