Publisher: IOP Publishing
ISSN: 1742-6596
Source: Journal of Physics: Conference Series , Vol.100, Iss.6, 2008-03, pp. : 38-41
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
REMOTE PLASMA CHEMICAL VAPOUR DEPOSITION OF SILICON NITRIDE FILMS
Le Journal de Physique IV, Vol. 02, Iss. C2, 1991-09 ,pp. :
Remote plasma chemical vapour deposition of silicon nitride films
Journal de Physique III, Vol. 2, Iss. 8, 1992-08 ,pp. :
PLASMA DEPOSITION OF SILICON NITRIDE
Le Journal de Physique IV, Vol. 02, Iss. C2, 1991-09 ,pp. :
Laser deposition of gallium nitride films
By Grekhov I. Linichuk I. Titkov I.
Technical Physics Letters, Vol. 32, Iss. 3, 2006-03 ,pp. :