Composition of oxygen precipitates in Czochralski silicon wafers investigated by STEM with EDX/EELS and FTIR spectroscopy

Publisher： John Wiley & Sons Inc

E-ISSN： 1862-6270|9|7|405-409

ISSN： 1862-6254

Source： PHYSICA STATUS SOLIDI - RAPID RESEARCH LETTERS (ELECTRONIC), Vol.9, Iss.7, 2015-07, pp. : 405-409

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