Silicon structures with dielectric insulation obtained by vertical anisotropic etching

Author: Guk E.   Tkachenko A.   Tokranova N.   Granitsyna L.   Astrova E.   Podlaskin B.   Nashchekin A.   Shul’pina I.   Rutkovskii S.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7850

Source: Technical Physics Letters, Vol.27, Iss.5, 2001-05, pp. : 381-383

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