Crystalline Inclusions Formed in C+N+BF2 Coimplanted on Silicon (111)

Author: Ponce Arturo   Morales Francisco M.   Molina Sergio I.   Barbadillo Lucía   Cervera Manuel   Hernández Marí J.   Rodríguez Pedro   Piqueras Juan  

Publisher: Springer Publishing Company

ISSN: 0026-3672

Source: Microchimica Acta, Vol.145, Iss.1-4, 2004-04, pp. : 165-169

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