Silicon double spring for the simultaneous calibration of probing forces and deflections in the micro range

Author： Brand Uwe   Li Zhi   Gao Sai   Hahn Susan   Hiller Karla  

Publisher： IOP Publishing

E-ISSN： 1361-6501|27|1|15601-15609

ISSN： 0957-0233

Source： Measurement Science and Technology, Vol.27, Iss.1, 2016-01, pp. : 15601-15609

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