Nano-motion actuator with large working distance for precise track following

Author： Mori Shigeki   Furuya Masato   Naganawa Akihiro   Shibuya Yotsugi   Obinata Goro   Ouchi Kazuhiro  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.13, Iss.8-10, 2007-05, pp. : 873-881

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