Low damage dry etch for III-nitride light emitters

Author: NedyJoseph G   YoungNathan G   KelchnerKathryn M   HuYanling   FarrellRobert M   NakamuraShuji   DenBaarsSteven P   WeisbuchClaude   SpeckJames S  

Publisher: IOP Publishing

E-ISSN: 1361-6641|30|8|85019-85027

ISSN: 0268-1242

Source: Semiconductor Science and Technology, Vol.30, Iss.8, 2015-08, pp. : 85019-85027

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Abstract