Nested folded-beam suspensions with low longitudinal stiffness for comb-drive actuators

Publisher: IOP Publishing

E-ISSN: 1361-6439|24|12|125022-125030

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.12, 2014-12, pp. : 125022-125030

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Abstract