A piezo-driven micro-inclination stage for calibration of a micro-acceleration transducer: structure and control strategy

Author： Shao Shubao Song Siyang Xu Minglong Xie Shilin Li Liang

Publisher： IOP Publishing

E-ISSN： 1361-6501|27|2|25008-25020

ISSN： 0957-0233

Source： Measurement Science and Technology, Vol.27, Iss.2, 2016-02, pp. : 25008-25020

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