Exoelectron emission studies of trap spectrum in ultrathin amorphous Si 3 N 4 films

Author： Naich M. Rosenman G. Roizin Y. Molotskii M.

Publisher： Elsevier

ISSN： 0038-1101

Source： Solid-State Electronics, Vol.48, Iss.3, 2004-03, pp. : 477-482

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