Measurement of the elastic and viscoelastic properties of dielectric films used in microelectronics

Author： Carlotti G.   Colpani P.   Piccolo D.   Santucci S.   Senez V.   Socino G.   Verdini L.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.414, Iss.1, 2002-07, pp. : 99-104

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