TiN/AlN bilayers and multilayers grown by magnetron co-sputtering

Author: Auger M.A.   Sanchez O.   Ballesteros C.   Jergel M.   Aguilar-Frutis M.   Falcony C.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.433, Iss.1, 2003-06, pp. : 211-216

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Abstract