Target voltage behaviour during DC sputtering of silicon in an argon/nitrogen mixture

Author： Depla D.   Colpaert A.   Eufinger K.   Segers A.   Haemers J.   De Gryse R.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.66, Iss.1, 2002-06, pp. : 9-17

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