Russian Microelectronics,volume 39,issue 6  (11-2014)

Period of time: 2014年6期

Publisher: MAIK Nauka/Interperiodica

Founded in: 1972

Total resources: 32

ISSN: 1063-7397

Subject: TN Radio Electronics, Telecommunications Technology

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Russian Microelectronics,volume 39,issue 6

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Measurements of linear dimensions of silicon nanorelief elements with a near-rectangular profile by defocusing the electron probe of a scanning electron microscope

By Valiev K.,Gavrilenko V.,Zhikharev E.,Danilova M.,Kal’nov V.,Larionov Yu.,Mityukhlyaev V.,Orlikovskii A.,Rakov A.,Todua P.,Filippov M. in (2010)

Russian Microelectronics,volume 39,issue 6 , Vol. 39, Iss. 6, 2010-11 , pp. 394-400

MAIK Nauka/Interperiodica

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