By Hoang H.T.   Tong H.D.   Gielens F.C.   Jansen H.V.   Elwenspoek M.C.   in Materials Letters

ISSN:0167-577X|58|3|525-528

Elsevier‎(2004)‎

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By Geerlings J   Sarajlic E   Berenschot J W   Siekman M H   Jansen H V   Abelmann L   Tas N R   in Journal of Micromechanics and Microengineering

ISSN:0960-1317|24|10|105013-105028

IOP Publishing‎(2014)‎

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