By Ylonen M.   Torkkeli A.   Kattelus H.   in Sensors and Actuators A: Physical

ISSN:0924-4247|109|1|79-87

Elsevier‎(2003)‎

Access to resources Favorite 10.763765

By Ylonen M.   Kattelus H.   Savin A.   Kivinen P.   Haatainen T.   Ahopelto J.   in Microelectronic Engineering

ISSN:0167-9317|70|2|337-340

Elsevier‎(2003)‎

Access to resources Favorite 6.741008

By Kiihamäki J.   Dekker J.   Pekko P.   Kattelus H.   Sillanpää T.   Mattila T.   in Microsystem Technologies

ISSN:0946-7076|10|5|346-350

Springer Publishing Company ‎(2004)‎

Access to resources Favorite 6.741008