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By Umezu I.   Koizumi R.   Mandai K.   Aoki-Matsumoto T.   Mizuno K.   Inada M.   Sugimura A.   Sunaga Y.   Ishii T.   Nagasaki Y.   in Microelectronic Engineering

ISSN:0167-9317|66|1|53-58

Elsevier‎(2003)‎

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