By Akhmetov V.D.   Richter H.   Lysytskiy O.   Wahlich R.   Muller T.   in Materials Science in Semiconductor Processing

ISSN:1369-8001|5|4|391-396

Elsevier‎(2002)‎

Access to resources Favorite 7.706047

By Akhmetov V. D.   Richter H.   Seifert W.   Lysytskiy O.   Wahlich R.   Müller T.   Reiche M.   in EPJ Applied Physics (The)

ISSN:1286-0042|27|1-3|159-161

Edp Sciences‎(2010)‎

Access to resources Favorite 6.718463