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By Das A. Le Q.T. Furukawa Y. Nguyen V.H. Terzieva V. de Theije F. Whelan C.M. Maenhoudt M. Struyf H. Tokei Z. Iacopi F. Stucchi M. Carbonell L. Vos I. Bender H. Patz M. Beyer G. Van Hove M. Maex K. in Microelectronic Engineering
ISSN:0167-9317|70|2|308-313
Elsevier(2003)
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