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By Fillot F.   Chenevier B.   Maitrejean S.   Audier M.   Chaudouet P.   Bochu B.   Senateur J.P.   Pisch A.   Mourier T.   Monchoix H.   Guillaumot B.   Passemard G.   in Microelectronic Engineering

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Elsevier‎(2003)‎

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