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By Mangelinck D.   Gas P.   Badeche T.   Taing E.   Nemouchi F.   Perrin-Pellegrino C.   Vuaroqueaux M.   Niel S.   Fornara P.   Mirabel J.M.   Fares L.   Albarede P.H.   in Microelectronic Engineering

ISSN:0167-9317|70|2|220-225

Elsevier‎(2003)‎

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