By Delan A.   Rennau M.   Schulz S.E.   Gessner T.   in Microelectronic Engineering

ISSN:0167-9317|70|2|280-284

Elsevier‎(2003)‎

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By Konig D.   Rennau M.   Henker M.   Ebest G.   in Thin Solid Films

ISSN:0040-6090|385|1|126-131

Elsevier‎(2001)‎

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