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By Fedotov A.   Saad A.M.H.   Enisherlova K.   Mazanik A.   Gorachev B.G.   Temper E.M.   in Microelectronic Engineering

ISSN:0167-9317|66|1|522-529

Elsevier‎(2003)‎

Access to resources Favorite 9.629806

 

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