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By Naumova O.V.   Antonova I.V.   Popov V.P.   Sapognikova N.V.   Nastaushev Y.V.   Spesivtsev E.V.   Aseev A.L.   in Microelectronic Engineering

ISSN:0167-9317|66|1|457-462

Elsevier‎(2003)‎

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