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Elsevier‎(2003)‎

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By Seok J.   Kim A.T.   Sukam C.P.   Jindal A.   Tichy J.A.   Gutmann R.J.   Cole T.S.   in Microelectronic Engineering

ISSN:0167-9317|70|2|478-488

Elsevier‎(2003)‎

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