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By Tokei Z.   Iacopi F.   Richard O.   Waeterloos J.   Rozeveld S.   Beach E.   Mebarki B.   Mandrekar T.   Guggilla S.   Maex K.   in Microelectronic Engineering

ISSN:0167-9317|70|2|352-357

Elsevier‎(2003)‎

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