By Ylonen M.   Torkkeli A.   Kattelus H.   in Sensors and Actuators A: Physical

ISSN:0924-4247|109|1|79-87

Elsevier‎(2003)‎

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By Ylonen M.   Kattelus H.   Savin A.   Kivinen P.   Haatainen T.   Ahopelto J.   in Microelectronic Engineering

ISSN:0167-9317|70|2|337-340

Elsevier‎(2003)‎

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