By Virbulis J.   Wetzel T.   Tomzig E.   von Ammon W.   in Materials Science in Semiconductor Processing

ISSN:1369-8001|5|4|353-359

Elsevier‎(2002)‎

Access to resources Favorite 10.072482

By Tomzig E.   Virbulis J.   von Ammon W.   Gelfgat Y.   Gorbunov L.   in Materials Science in Semiconductor Processing

ISSN:1369-8001|5|4|347-351

Elsevier‎(2002)‎

Access to resources Favorite 8.971325

By Galindo V.   Gerbeth G.   von Ammon W.   Tomzig E.   Virbulis J.   in Energy Conversion and Management

ISSN:0196-8904|43|3|309-316

Elsevier‎(2002)‎

Access to resources Favorite 8.971325

By Kalaev V.V.   Lukanin D.P.   Zabelin V.A.   Makarov Y.N.   Virbulis J.   Dornberger E.   von Ammon W.   in Materials Science in Semiconductor Processing

ISSN:1369-8001|5|4|369-373

Elsevier‎(2002)‎

Access to resources Favorite 7.2790728