By Shoji Yasushi   Akimoto Katsuhiro   Okada Yoshitaka   in Journal of Physics D: Applied Physics

ISSN:0022-3727|46|2|24002-24009

IOP Publishing‎(2013)‎

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By Maruyama Takahiro   Miyajima Yutaka   Hata Kazutaka   Cho Sung   Akimoto Katsuhiro   Okumura Hajime   Yoshida Sadafumi   Kato Hiroo   in Journal of Electronic Materials

ISSN:1543-186X|27|4|200-205

Springer Publishing Company ‎(1998)‎

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