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By Fardindoost Somayeh Alipour Akbar Mohammadi Saeed Gokyar Sayim Sarvari Reza Fardindoost Somayeh Fardindoost Somayeh in Journal of Micromechanics and Microengineering
ISSN:0960-1317|25|7|75016-75022
IOP Publishing(2015)
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