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ISSN:0957-4530|24|11|2491-2503

Springer Publishing Company ‎(2013)‎

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By Spengler N   Moazenzadeh A   Meier R Ch   Badilita V   Korvink J G   Wallrabe U   in Journal of Micromechanics and Microengineering

ISSN:0960-1317|24|3|34004-34013

IOP Publishing‎(2014)‎

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