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By Bruchmann C.   Höfer B.   Schreiber P.   Eberhardt R.   Buss W.   Peschel T.   Gebhardt S.   Tünnermann A.   Beckert E.   in Microsystem Technologies

ISSN:0946-7076|14|4-5|683-690

Springer Publishing Company ‎(2008)‎

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