By Bourrier David   Charlot Samuel   Valdez-Nava Zarel   Bley Vincent   Combettes Céline   Lopez Thomas   Laur Jean-Pierre   Brunet Magali     in Journal of Micromechanics and Microengineering

ISSN:0960-1317|24|10|104003-104012

IOP Publishing‎(2014)‎

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